Tokyo Electron launches wafer tester for MEMS

July 17, 2003 — Tokyo Electron Ltd. has released a new wafer test system for MEMS devices, according to a news release.

The company, based in Tokyo with U.S. offices, said its new system is specifically designed for MEMS and other devices for which high-vacuum wafer testing is required. Testing in vacuum conditions is necessary because of shrinking device sizes, the release said.


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