August 25, 2003 – Canon plans to invest 100 billion yen ($851.6 million) to develop next-generation steppers using 60nm processes, according to the Nihon Keizai Shimbun.
The company will add 300 employees for the project, scheduled to be completed by 2005. Canon is already planning to build new R&D facilities alongside in Tochigi Prefecture, replacing existing R&D and manufacturing facilities.