Wafer handler accomodates ISO Class 3 environs

AUG. 7–NASHUA, NH–Developed under an alliance with Integrated Dynamic Engineering, the Duofem handler from Robotic Vision Systems Inc. accommodates from 100mm to 300mm wafers, including wafers in film frame.

The device handles the full breadth of wafer formats in a single, ISO Class 3 cleanroom compliant system, and is incorporated into the company’s WS-series of bumped wafer inspection systems such as the WS-2500, WS-2510, and WS-3000 systems.

Frank Jacovino, VP and GM, said, “With the Duofem handler, changeover between wafer formats can be achieved in minutes. In other cases, customers such as foundries and service companies have the requirement to switch between inspecting whole wafers and wafers mounted on film frames, which the Duofem handler also can accommodate quickly.”


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.