Silicon Microstructures completes fab expansion

Sept. 17, 2003 — Silicon Microstructures Inc., a Milpitas, Calif., developer and manufacturer of MEMS-based silicon pressure sensors and custom microstructures, announced the completion of its MEMS fab expansion and renovation.

The expansion udated the wafer fabrication areas, added capacity and expanded the fab’s 6-inch wafer capability. The company said the expansion will allow it to bring in some process steps that had previously been subcontracted.

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