SMI finishes MEMS fab

September 16, 2003 – Silicon Microstructures Inc. (SMI), Milpitas, CA, says it has completed expansion at its MEMS wafer fab in Milpitas two months ahead of schedule. The multi-million project included updating fab facilities, and adding and upgrading capacity to include 6-in. capabilities for the company’s’ bulk and surface micromachining processes.


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