Unaxis unveils etch system

September 15, 2003 – Unaxis Semiconductors, St. Petersburg, FL, has unveiled an addition to its line of deposition and etching systems. The Versaline offers process modules for up to 8-in. wafers and a range of deposition and etch processes, and can be equipped with a large-area PECVD deposition module, or modules for ICP, PHF or HiPOE etching.


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