Veeco sues Asylum Research

Sept. 19, 2003 — Veeco Instruments Inc., a Woodbury, N.Y., provider of metrology products and process equipment tools, filed a lawsuit against Asylum Research Inc. of Santa Barbara, Calif., according to a Veeco news release.

The lawsuit alleges that Asylum’s MFP-3D atomic force microscope infringes on five patents owned by Veeco, in addition to other claims.

Asylum issued a statement denying that any Veeco patents are infringed in the manufacture of the MFP-3D and adding that the company would vigorously defend itself.

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