Cymer names litho VP

September 29, 2003 – Cymer Inc., San Diego, CA, a supplier of excimer laser light sources, has named Anthony Yen as senior VP of lithography market development.

Yen was previously co-director of International Sematech<>H’s lithography division, and formerly served as a department manager of advanced lithography technology at TSMC, overseeing lithography processes for the company’s 0.25-micron to 0.13-micron logic processes.


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