Omron introduces wafer heating system

October 22, 2003 – Japan’s Omron Corp. has developed a new system to control the temperature to which wafers and LCD panels are subjected during thermal processing, according tot he Nihon Keizai Shimbun.

The system uses multiple sensors in an oven to read data and adjust heating to reduce variations across the material’s surface by 1/5 compared with conventional temperature control methods.

Omron plans to begin marketing the system by 2Q04.


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