Tegal makes sale for MEMS, nano devices

Oct. 27, 2003 — Tegal Corp. said a European semiconductor manufacturer has ordered two of its plasma etch systems so the company can expand into manufacture of MEMS and nanoscale devices, according to a company news release.

null

Petaluma, Calif.-based Tegal said it expects the 980 Series systems to be installed at the chipmaker’s fab in January. Tegal’s etch and deposition systems are used to produce MEMS, optical telecom devices, integrated circuits, radio-frequency identification devices and other microelectronics.

null

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.