OCT. 17–FREMONT, Calif.–Asyst Technologies, Inc. a provider of integrated automation systems for semiconductor manufacturing, says ULVAC Technologies, Inc. has selected its Plus Portal XT integrated equipment front-end system, GWconX300 connectivity software and integration services for a second generation 300 mm ENVIRO Advanced Resist and Residue Removal tool.
The ULVAC tool is used for both conventional as well as low-k process applications for 45nm technology and beyond.
“Asyst’s ability to offer a complete automation solution, as well as providing a high level of customer support and integration services, were the key factors in our decision,” said Wayne Anderson, Chief Operating Officer at ULVAC.
According to Asyst, the Plus Portal XT is an automated equipment front-end system that incorporates a unique design approach and the latest in robotics and front-load technology to deliver cost-effective and enhanced productivity, serviceability and ease-of-integration.
GWconX300 is software for implementing communications links on semiconductor wafer fabrication equipment, using the new Semiconductor Equipment and Materials International (SEMI) standard protocols required for all 300 mm and advanced 200 mm factory-automation systems.
It provides run-time software libraries designed for incorporation with the embedded control software of any type of 300 mm equipment. GWconX300 also provides tools for rapid development and integration of connectivity software.
Key features include automated handling of inter-compatibility between new SEMI standards; field-configurable adjustments to ensure compatibility of equipment with older legacy host computers; automatic process, syntax checks and replies to all messages mandated by the specified SEMI standard; and hooks for synchronization with the SEMI E84 standard, to ensure a smooth handshake between production equipment and the AMHS.