OCT. 24–GLOUCESTER, Mass.–Varian Semiconductor Equipment Associates, Inc., a supplier of ion implantation systems, says seven customers located in China, Korea, Singapore and Taiwan have placed orders for the recently-released single wafer VIISta 80HP high current ion implanter to support their advanced device development and manufacturing needs.
“As customers move toward smaller devices, the need for single wafer systems with superior angle control, contamination control and productivity intensifies,” said Dr. Yong-Kil Kim, Varian’s vice president and general manager of Asia operations. “Single wafer implantation, always the mainstay for medium current ion implanters, is now becoming a requirement for high current applications in the world’s most advanced fabs.”
The VIISta platform of ion implanters processes 300 wafers per hour. All of the VIISta products feature the Varian Control System, the Varian Positioning System, and a common single wafer endstation.
This high degree of commonality across the VIISta platform facilitates process matching throughout the tool set and provides flexibility in managing capacity, product mix changes, spare parts and training.