November 3, 2003 – EV Group, Scharding, Austria, and Silicon Genesis Corp. (SiGen), San Jose, CA, have signed an agreement to develop low-temperature wafer bonding technologies.
Under the licensing deal, SiGen will transfer equipment and processes to EV for inclusion in EV’s line of wafer bonding tools. The combined technologies will provide high-throughput, low-temperature activated plasma bonding for EV’s wafer bonding system and cluster platforms.