ADE adds inspection capabilities

December 10, 2003 – — ADE Corp., Westwood, MA, has introduced new tools for inspecting the front, backside, and edges of wafers. The EdgeCheck and Backside Quality Monitor tools help identify and sort wafer edge defects and particles on the surfaces of unpatterned and bare silicon wafers. Both are available as options for ADE’s film inspection tools and surface inspection systems.

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.