KLA-Tencor beefs up wafer inspection

December 17, 2003 – KLA-Tencor, San Jose, CA, has added inline process monitoring capabilities to its Surfscan family of wafer inspection products. The Monitor eXpert software suite enables the tools to perform various measurements online, including haze measurement, porosity of low-k dielectrics, uniformity of resist and film thickness and CMP pads, and changes in copper ECD chemical processes.


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