SensoNor chooses SUSS tools for tire sensors

Jan. 19, 2004 — SensoNor ASA (News, Web) has chosen SUSS MicroTec AG’s (News, Web) MEMS production systems to make tire pressure sensors, according to a news release.

The Norwegian MEMS sensor developer, acquired last year by Infineon Technologies AG (NYSE: IFX, News, Web), is buying two MA150e production mask aligners and ABS150e volume production bond cluster. The systems will support photolithographic and wafer bonding processes, the release said.

SUSS, based in Munich, Germany, supplies production, process and test technology for the semiconductor industry.


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