SUSS MEMS equipment package chosen by SensoNor to make tire pressure sensors

(January 19, 2004) Munich, Germany&#8212SUSS MicroTec AG’s MEMS production systems have been chosen by SensoNor, a MEMS manufacturer for the automotive industry, to manufacture tire pressure sensors. Lithography and wafer-to-wafer bonding are two important steps in the MEMS fabrication process.


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