SUSS sells nano tool to Taiwanese R&D center

Jan. 14, 2004 — SUSS MicroTec AG (News, Web) has sold a stepper system to a Taiwanese organization for nanoscale research and development, according to a news release.


The Industrial Technology Research Institute selected SUSS’ Nano Patterning Stepper 200 for embossing applications at the wafer level. The NPS 200 uses stamps or templates to create micro and nanoscale features in devices for photonics, biotechnology and other applications.


SUSS, based in Munich, Germany, said the system can be used for all steps required for different imprint lithography technologies.


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