FSI, SCP settle patent suits

February 19, 2004 – FSI International Inc., Chaska, MN, and SCP Global Technologies Inc., Boise, ID, have settled litigation alleging patent infringement of wafer processing technologies.

SCP had claimed that technology from YieldUp International, which FSI acquired in 1999, infringed four patents relating to SCP’s Full-Flow and IPA technologies.

Under the deal, FSI will pay $4 million to release the claims and license the patents.


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