FEI claims 1-angstrom success

March 31, 2004 – FEI Co., Hillsboro, OR, said it has broken the one-Angstrom (0.1nm) image resolution barrier with a 200kV transmission electron microscope (TEM).

The process, which improves image resolution with electron optics developed by FEI and CEOS Co., could enable TEM techniques such as 3D reconstruction with tomography, scanning probe applications, and in situ observation of specimen responses to variations in temperature, stress or chemical environments.

The achievement of sub-1-Angstrom resolution “marks a major milestone for the field of electron microscopy,” said Michael O’Keefe of the National Center of Electron Microscopy in Berkeley, CA.


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