March 4, 2004 — Ion Optics Inc., a Waltham, Mass., developer of optical MEMS gas detection sensors, announced that it is working with MEMS manufacturer Innnovative Micro Technology (IMT) of Santa Barbara, Calif., to move its SensorChip products into production.
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The SensorChip is a silicon micromachined gas sensor for detecting carbon dioxide and combustible gases. Applications include medical and process monitoring, industrial safety and residential and automotive use.