Inventor’s Corner

Anti-static cleanroom products

The anti-static cleanroom products have a coating of conductive polymeric particulates (pyrrole polymers), which decreases the surface resistivity. The anti-static properties are achieved by depositing conductive polymer particles onto the non-conductive substrate surface.

The anti-static products include cleanroom wipers, stationery products (notebooks and writing instruments), garments and polyurethane foam-tipped swabs. The cleanroom stationery products include notebooks that are made of polyethylene impregnated with silica. The invention also includes anti-static plastic gloves.

Patent number: 6,685,989 B2
Date granted: Feb. 3, 2004
Inventors: Himansu R. Bhattacharjee and Edward Paley, of Illinois Tool Works (Glenview, Ill.)

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Cleanroom lift

The invention, a cleanroom lift (A), maneuvers large objects such as turbomolecular pumps (B), and is utilized in 200-mm and 300-mm semiconductor processing applications. In one embodiment, the lift includes a vertically movable carriage (C) coupled to a linkage assembly (D).

The linkage assembly has two links, and each has a one-piece construction to minimize deflection under load. The first link is coupled to the carriage by a carriage shaft assembly (E) and to the second link by a linkage shaft assembly (F). The linkage shaft assembly cradles the gripper assembly (G).

Patent number: 6,688,838 B2
Date granted: Feb. 10, 2004
Inventors: Ilya Lavitsky and Michael Rosenstein, of Applied Materials Inc. (Santa Clara, Calif.)

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Airborne bacteria sampler

The hand-held airborne bacteria sampler has nozzle openings (A) that each include a straight duct (B) and tapered portions (C) that are situated at an upstream position of an air flow.

The nozzle openings are formed in a nozzle plate (D) such that the openings are arranged in grid, and airborne microorganisms passing through the nozzle plate can be effectively collected to form colonies. A degree of cleanliness is measured by counting the colonies visually.

Nozzles are held in place by a support means (E), and within a space underneath the chalet holder (F); a high-static pressure fan (G) and a vortex blower motor (H) allow air to be drawn into the machine for sample collection. A filter (I) cleans exhausting air.

The invention also includes a hand grip (J), an operating control section (K), and a collecting section (L). Also pictured is the nozzle area (M).

Patent number: 6,692,953 B1
Date granted: Feb. 17, 2004
Inventors: Naoki Sugita, Yutaka Hatta, Takeshi Yamada and Yukihiro Nukata, of Midori Anzen Co. Ltd. (Tokyo)

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