IEEE, SEMI sit at MEMS table

June 7, 2004 – SEMI and IEEE have signed an agreement to support each other’s efforts in creating nanotechnology and microelectromechanical systems (MEMS) standards, the first standards collaboration between the two organizations.

Under the partnership, SEMI and IEEE will appoint liaisons and define a regular exchange of information with periodic joint meetings, as well as update each other’s committees and disseminate standards information on nanotechnology and MEMS. The IEEE standards association’s nanotechnology standards effort expects to publish a measurement standard for carbon nanotubes by 2005; SEMI also has a MEMS initiative underway.

SEMI’s MEMS efforts will address areas including materials, tools, and interfaces, while the IEEE standards will address test methods, materials, devices, interoperability, and other topics, according to Bettina Weiss, SEMI’s director of international standards and MEMS. Possible focus areas include organic, molecular, carbon nanotubes, and silicon nanofiber-based devices, added Judith Gorman, managing director of the IEEE standards association.


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