Sopra taps IMEC’s thin-film technology

June 16, 2004 – Sopra, a French supplier of metrology tools for thin films, has licensed ellipsometric porosimetry (EP) patents from European research center IMEC.

Sopra plans to incorporate the R&D EP technology, which monitors porosity, pore size distribution, surface area, and pore interconnectivity in thin films, into a commercial tool to be introduced this summer.

Sopra’s forthcoming product will offer several EP models with gradual automation capacbilities, from manual EP5 to models with mapping capabilities for 200mm and 300mm wafers, said Sopra CEO Marc Stehle.

“Ellipsometric porosimetry has been a key enabler to study low-k materials properties as well as some of their integration issues,” added Rudi Cartuyvels, IMEC director of interconnect technologies and technology options.


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