Akrion sells multiple single-wafer tools for 300mm Cu processing

September 22, 2004 – Akrion has announced that its wholly owned subsidiary, Goldfinger Technologies LLC, has received an order for five Goldfinger Mach2HP single-wafer systems. The Mach2HP cleaners will ship to a DRAM manufacturer in Asia for its most advanced (<130nm) 300mm copper process manufacturing line.

The tool sets (just 1.2 meters wide by 3.0 meters deep) will provide post metal etch/ash cleaning (BEOL). The Mach2HP system includes four process chambers and utilizes patented Goldfinger XT megasonic and Sahara drying technologies.

The flexible process capability of the system allows its configuration for FEOL post-deposition and other particle cleans as well as configurations for BEOL post ash/etch cleaning applications on both aluminum and copper integrated devices. The Mach2HP is available in 200mm, 300mm, and 200mm/300mm bridge configurations.


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