Akrion GAMA systems to ship to Singapore fab

Jan. 12, 2005 — Akrion Inc. of Allentown, Pa., announced the sale of two GAMA series tool sets to a leading device manufacturer. The GAMAs will be used for pre-diffusion cleaning and will ship to the customer’s Singapore site as part of a fab expansion.

The pre-diffusion clean GAMA systems will incorporate megasonics for enhanced particle removal, Akrion’s proprietary chemical concentration control and advanced ozone technology.

Akrion sells single-wafer wet cleaning equipment used in the production of a range of semiconductor and related devices, including integrated circuits, MEMS and photomasks.


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