Jan. 19, 2005 — EV Group, a manufacturer of MEMS, nano and semiconductor wafer-processing equipment, said it has shipped and successfully installed an IQ Aligner at Promerus LLC, a developer of materials for applications in the semiconductor, optoelectronic and semiconductor packaging markets.
Promerus will use the IQ aligner for development of wafer-level packaging materials. The IQ Aligner’s advanced-packaging capabilities include photolithographic processes to perform IC packaging at wafer level in prototype or volume production with both 200mm and 300mm wafer-size capability.
Based in Brecksville, Ohio, Promerus is a wholly owned subsidiary of Sumitomo Bakelite Co., Ltd., of Tokyo. EV Group is a global supplier of wafer bonders, aligners, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets. It is based in Scharding, Austria.