January 7, 2005 – Ibis Technology Corp. announced the receipt of an order for an Ibis i2000 oxygen implanter from a leading manufacturer of silicon wafers. The dollar amount of the equipment sale is approximately $6 million.
Martin J. Reid, president and CEO of Ibis Technology Corp., said, “We are very pleased to have received this order from one of the world’s top manufacturers of electronic grade silicon wafers. This customer has used earlier generations of Ibis implanters to produce SIMOX-SOI wafers up to 200mm in size.”
The Ibis i2000 oxygen implanter was introduced in March 2002 as a third-generation implanter designed to be a high-throughput, high-volume production tool for manufacturing 200- and 300mm SIMOX-SOI wafers. The i2000 implanter’s flexibility, automation and operator-friendly controls allow this tool to produce a wide range of SIMOX-SOI wafer products.