Accent launches new tool

Feb. 21, 2005 — Accent Optical Technologies, a supplier of lattice engineering and photolithography process control tools, announced a new 200mm overlay tool, the Q240AT.

The tool is designed to incorporate the productivity and advanced measurement technology of the Caliper elan 300mm overlay tool, providing an overlay metrology solution for 200mm fabs looking to adopt advanced processes.

The company says it provides measurement capability targeting production processes down to 65nm by the adoption of new optics, imaging hardware, focus system and measurement algorithms.


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