In even-numbered years, such as 2004, the International Technology Roadmap for Semiconductors (ITRS) undergoes an update in preparation for a full revision the following year, as is expected in 2005. In the new 2004 ITRS edition, 128 out of the roadmap’s 218 tables were updated and 4 new tables were added. The 2004 edition also added a new sub-chapter on Emerging Research Materials.
Solid State Technology collaborated with leaders in various technical working groups of the 2004 ITRS to highlight the most significant updates in the new edition of the Roadmap, as well as major challenges to be addressed in the 2005 revision. A summary is presented here for the ITRS chapters dealing with frontend processing, wafer cleaning, interconnect, lithography, process integration, and emerging devices and materials.
FRONTEND PROCESSING
More attention shifts to metal gate/high-k transistors and SOI
Jeffery W. Butterbaugh, FSI International Inc., Chaska, MN; Carlton Osburn, North Carolina State U., Raleigh, NC; Larry Larson, SEMATECH Inc., Austin, TX
WAFER CLEANING
What’s driving surface preparation challenges
Jeffery W. Butterbaugh, FSI International Inc., Chaska, MN; Christopher Case, BOC Edwards, Murray Hill, NJ
INTERCONNECT
Scaling-induced scattering effects raise concerns over copper resistivity
Christopher Case, BOC Edwards, Murray Hill, NJ
LITHOGRAPHY
For upcoming process nodes immersion and RET take center stage
Scott Hector, SEMATECH Inc., Austin, TX
PROCESS INTEGRATION
Challenges loom as transistor scaling progresses
Peter M. Zeitzoff, SEMATECH Inc., Austin, TX
EMERGING RESEARCH DEVICES & MATERIALS
CMOS extension and replacement hinge on mix of new materials and device structures
James Hutchby, Semiconductor Research Corp., Research Triangle Park, NC; C. Michael Garner, Intel Corp., Santa Clara, CA
Notes:
Reading the 2004 update tables
In the 6 summaries attached, unless otherwise specified, the tables’ colored boxes should be interpreted as: white = solutions exists; yellow = solutions are known; and red = no known solution. These tables may be slightly truncated from the official versions and are correct as of press time. The complete 2004 ITRS and tables are available for viewing and printing at http://public.itrs.net.
Courtesy Line
Tables and figures from the ITRS are courtesy of the Semiconductor Industry Association, The International Technology Roadmap for Semiconductors, 2004 edition, SEMATECH Inc., Austin, TX, 2004.