February 1, 2005 – EV Group has announced that it will open a joint cleanroom facility in Korea with its agent Jinsan Scientific Co. Ltd. and Jinsan Micro-Engineering Ltd. (JML) on March 10. The new facility is located at the Technology Innovation Center of Sung Kyun Kwan University (SKKU) in Suwon, Korea.
The JML lab is designed for MEMS and advanced-packaging processes as well as for nanoimprint lithography, and contains a state-of-the-art Class 100 cleanroom. As the lead equipment supplier for the facility, EV Group will provide tools for advanced lithography and wafer-bonding processes. These include an EVG6200 Infinity mask-and-bond aligner, an EVG520HE semi-automated wafer-bonding and hot-embossing system and an EVG101 spin-and-spray coating system. All systems are capable of processing wafers and substrates up to 200mm. Other equipment suppliers for the cleanroom include Surface Technology Systems plc, technotrans AG and Raith GmbH.
“This collaborative, state-of-the-art facility will be a core site to perform research, run sample processes and qualify processes in close proximity to the Korean customer base,” said Dr. Peter Podesser, CEO of EV Group.
In conjunction with the official opening of the facility on March 10, a two-day workshop on nanoimprint lithography and wafer-level packaging will be held on March 10-11 at the Technology Innovation Center. The workshop will feature sessions by EV Group, technotrans, and Raith, as well as leading research organizations in the Asian region, such as Waseda University, and the Korea Institute of Machinery and Materials (KIMM).