Recent equipment orders include:
Axcelis Technologies Inc. has announced that a leading European chipmaker has selected its new 300mm single-wafer ion implantation platform. Axcelis said that the customer chose this platform because of its ability to address a broad range of implant applications, including low energy HALO processes.
Mattson Technology Inc. has announced that it has shipped multiple advanced strip systems to Samsung Electronics Co. Ltd.. In addition, Samsung has placed follow-on orders for Mattson’s rapid thermal processing (RTP) and chemical vapor deposition (CVD) systems.
Royal Philips Electronics today announced that its metrology business unit, Philips Advanced Metrology Systems Inc. (Philips AMS), has received a multi-unit order for its series 3300 copper metrology tool from AMD Saxony LLC & Co. KG, Dresden, Germany, a subsidiary of Advanced Micro Devices Inc. (AMD) in Sunnyvale, CA. AMD will incorporate the Philips AMS equipment as a metal metrology tool for on-line production monitoring of the copper/low-k process for both 200mm and 300mm fabs and has been running the Philips AMS Series 3300 at its Dresden fab for several months.