Feb. 2, 2005 — Rite Track, a manufacturer of track systems for the semiconductor, MEMS and thin film head industries, announced it has taken a major order for a deep UV (DUV) 90-S system.
The customer fab is located in the eastern United States but its identity is not being disclosed, the company said. Tim Hayden, Rite Track’s president and CEO said in a prepared statement that the system that will be shipped was designed from the beginning for DUV processing rather than merely adapted later.