Feb. 7, 2005 — FEI Co., a Hillsboro, Ore., maker of nanotech tools, and IMEC, a Leuven, Belgium-based nanoelectronics and nanotechnology research center, announced today they have commenced a joint development project for advanced metrology and analysis techniques for sub-45nm technologies.
The project will focus on providing diagnostic information at ultra-high resolution of the processes in a production environment for 45nm and smaller technologies. IMEC will use FEI’s UltraView tools in the process R&D pilot line.