Tool maker, research center launch development project

Feb. 7, 2005 — FEI Co., a Hillsboro, Ore., maker of nanotech tools, and IMEC, a Leuven, Belgium-based nanoelectronics and nanotechnology research center, announced today they have commenced a joint development project for advanced metrology and analysis techniques for sub-45nm technologies.

The project will focus on providing diagnostic information at ultra-high resolution of the processes in a production environment for 45nm and smaller technologies. IMEC will use FEI’s UltraView tools in the process R&D pilot line.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.