Mar. 4, 2005 — Microfabrica, a Burbank, Calif., developer of a MEMS manufacturing process, announced it has extended the capabilities of its EFAB process to fabricate complex three-dimensional microdevices over a millimeter tall.
The company says its process is now the first micro-manufacturing technology to allow the fabrication of 1mm tall and taller 3D microsystems and devices with micron precision.
Taller heights allow for easier interface and seamless integration into macro-scale systems, while complex 3-D designs open the door to numerous applications that require miniaturized metal parts in military, medical and consumer electronics applications.