Tegal receives PVD cluster tool order

Mar. 31, 2005 — Tegal Corp. (Nasdaq: TGAL) announced that a Silicon Valley-based technology company has placed an order for an Endeavor AT PVD cluster tool.

The tool will be used in the development of RRAM (Resistive Random Access Memory) devices incorporating new materials. The customer needs low temperature deposition of the materials to fabricate non-volatile, high-density memory cells separately from logic devices for system-on-chip applications, according to a press release.

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