European collaboration will use SOI for MEMS fabrication

By Brian Dance, European Correspondent

New technology developed by QinetiQ, Malvern, UK, is to be used by Tronic’s Microsystems SA, Crolles, France, for the volume production of innovative micro-electromechanical system (MEMS) devices. The technology teams will collaborate to achieve process design and compatibility, including full process statistics.

A team of over 120 people, working in the UK and France, will ensure concept feasibility and achieve product design and simulation. This will be followed by the commercialization and fully integrated volume manufacture of these high value added components. Product lifetime costing can be accurately predicted and planned into the product development cycle.

QinetiQ was formed by privatization of the former British government defense research site, DERA (Defense Evaluation Research Agency), previously RSRE (Royal Signals and Radar Establishment). It develops new technology and prototype products, but is not involved in high volume production. QinetiQ has extensive experience of inertial sensor, micro-fluidic and optical component designs using SOI (Silicon-On-Insulator) substrates that have been developed in ten years of leading edge research on MEMS devices and materials.

Tronic’s is a 1997 spin-off from LETI (Laboratoire d’


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