Akrion will ship multiple systems to major MEMS supplier

May 18, 2005 – Akrion Inc. today announced the receipt of several orders from a long-time customer, one of the world’s largest suppliers of MEMS. The order, valued at more than $2.5 million, includes 2 V3 batch-immersion systems and an upgrade to an existing GAMA Series wet cleaning system.

One of the V3 systems will be used for an etch process and the other for a clean step in the customer’s west coast USA manufacturing plant. The V3 is a very compact batch-immersion system offering dry-to-dry process capability.

The upgrade to the GAMA system includes the addition of GAMAplus in situ process modules. The in situ modules offer the advantage of reduced air interfaces to enhance particle removal.


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