May 2, 2005 – Y.A.C Co. has created a conveyor-belt-type transport device that not only moves semiconductor wafers about three times faster than conventional ones, but it can also stock inventory on its rails, said the Nihon Keizai Shimbun. The automated machinery manufacturer plans to start selling the device in August. It hopes to make deliveries to three firms during this fiscal year, targeting sales of 300 million yen (US$2.85 million).
This device transports wafers in containers, which can each hold 25 300mm wafers. It features a design that reduces the buildup of dust and other particles. The conveyor will be available in 200mm and 300mm widths.
In addition, the device has sensors that determine the distance between containers being transported, making adjustments automatically and moving the containers at a speed of 1 meter per second.
The conveyor also acts as a storage unit, a function that helps save space. In a conventional setup, storage space for temporarily holding the materials was necessary. In the case of a typical chipmaking plant in which materials need to be transported over a route measuring about 1000 meters, Y.A.C says that plant storage space can be reduced by 30-50%.