Hitachi releases FE-SEM model S-5500

May 4, 2005 – Hitachi High Technologies America, Inc., a Pleasanton, Calif. supplier of tools and services for metrology, etch, defect review, inspection and failure analysis, announced the release of its latest high-resolution in-lens Field Emission Scanning Electron Microscope (FE-SEM), the new Model S-5500. The S-5500 is guaranteeing 4 angstrom (0.4nm) image resolution in secondary electron (SE) mode.

The company says that the diverse capabilities of the instrument bridge many research fields, from silicon-based device design and characterization to biological applications with high throughput and fast sample exchange. This allows the user to achieve high quality results quickly and easily.

“Advances in transmitted electron detection technology and countermeasures against environmental interferences make our new in-lens SEM design a powerful investigative tool for nanotechnology research,” said Robert Gordon, vice president and general manager, Hitachi High Technologies America, Inc.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.