Mattson ships multiple RTP systems

May 19, 2005 – Mattson Technology Inc. has announced that it has shipped multiple Helios RTP systems to a leading European chipmaker. Tool installations are scheduled to begin this month at the customer’s 300mm fab.

The systems will be used for 90nm production of advanced DRAM devices. The sale complements the suite of 200 and 300 mm Mattson RTP systems already installed at this chipmaker’s facilities around the world.


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