Veeco, CEA Leti, Team NanoTec will jointly develop AFM tips

May 27, 2005 – Veeco Instruments Inc. has signed a two-year joint development program (JDP) agreement with CEA Leti, a European applied research electronics laboratory, and Team Nanotec, a maker of atomic force microscopy (AFM) probe tips, for the development of tips for Veeco’s AFMs.

The JDP will allow engineering teams from all three organizations to collaborate on development of next-generation tips, which will be critical as the semiconductor industry evolves below 70nm, a Veeco press release said. Each organization has designated a team of personnel and will provide resources, including tips, tools, and samples with advanced design rules for this project.

Team Nanotec develops, manufacturers and sells, among other products, AFM tips that are often used by Veeco’s customers in conjunction with its systems. Team Nanotec specializes in small (less than 90nm), high aspect ratio tips. Leti has been a strong customer and collaborator with Veeco for several years, having used Veeco’s AFMs in its 300mm clean room for 3-D imaging, the Veeco press release said.


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