Sematech, Novellus partner to develop film technology

June 8, 2005 — Novellus Systems Inc. (Nasdaq: NVLS) and research consortium SEMATECH are partnering to develop and evaluate low-k dielectric films.

The San Jose, Calif.-based Novellus manufactures processing equipment for making integrated circuits. Global semiconductor industry consortium SEMATECH is based in Austin, Texas.

As part of the joint agreement, SEMATECH will purchase a VECTOR PECVD system from Novellus for depositing ultra low-k films and a novel ultraviolet thermal processing system for post-deposition film curing. Both systems are to be delivered to SEMATECH in October of 2005. Novellus will provide bulk film development and support, while SEMATECH will contribute technical expertise.

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