SEMI publishes new standards

June 24, 2005 — SEMI, the San Jose, Calif., trade group representing makers of semiconductor equipment and materials, is publishing new standards.

The standards are applicable to the semiconductor, flat panel display and MEMS manufacturing industries. They include specifications and guidelines for ellipsometer equipment for use in integrated metrology, sensor/actuator network communications, silicon carbide wafers and safety in multi-employer work areas.


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