GLOUCESTER, MA — (MARKET WIRE) — 06/21/2005 — Varian Semiconductor Equipment Associates, Inc. announced today that it has shipped a platform of VIISta single wafer ion implanters to Winbond Electronics Corporation in Taiwan to be used in 300mm production. The shipment of platform tools consist of VIISta HC high current, VIISta 810XE medium current and VIISta 3000HP high energy ion implanters. The full suite of VIISta platform tools has now been selected by multiple semiconductor manufacturers in Asia and the United States.
Winbond selected Varian Semiconductor due to its market leadership in single wafer ion implanters and the cost of ownership benefits associated with a complete platform of VIISta products. Victor Wang, 300mm Fab Director of Winbond, said, “Varian Semiconductor’s single wafer ion implanters provide us with a flexible manufacturing solution to meet our advanced production requirements. We selected an all-single wafer solution because they are inherently cleaner and offer greater process flexibility. With the single wafer VIISta platform, we are able to reduce the overall number of ion implanters and lower our capital costs, while maintaining high productivity over a broad range of applications.”
“We believe the clear message behind this platform order is that advanced devices require the repeatability, cleanliness and high productivity advantages of single wafer ion implantation,” said Gary Dickerson, Varian Semiconductor’s chief executive officer. “We are looking forward to working together with Winbond to implement the technology, cost and flexibility advantages that can be achieved with the VIISta platform of single wafer ion implanters.”
The VIISta products make up the only production-proven single wafer platform of ion implanters in the industry. All of the VIISta products feature the Varian Control System (VCS™), the Varian Positioning System (VPS™) and a common single wafer endstation. This high degree of commonality across the VIISta platform eases integration into factory automation, lowers spare parts and training costs, and simplifies tool operation.