EV Group to support nanofabrication technologies at Stanford with nanoimprint tool

July 06, 2005 – EV Group, a leading manufacturer of MEMS, nano and semiconductor wafer-processing equipment, announces the installation of an EVG620 precision alignment system for nanoimprint lithography (NIL) at Stanford Nanofabrication Facility (SNF) in Stanford, CA. With capabilities for UV molding and micro contact printing to realize feature sizes down to the sub-100 nm range, this new aligner will be an integral part in SNF’s goal to support the use of micro- and nanofabrication technologies in non-traditional research. This technology lends itself to a relatively inexpensive method for creating nanoscale structures that previously required a substantial expenditure in capital equipment and a complex and time-consuming process.

Being a primary resource for many MEMS and microfabrication-based research projects throughout Stanford University, the SNF is also accessed by a wide range of researchers from other universities and industrial companies for MEMS and nanoimprinting R&D projects.

“We enjoy an excellent relationship with EV Group who support our efforts in novel double-side alignment and wafer bonding methods for research applications. We feel this relationship is key in establishing new nanoimprint lithography capabilities for our research community,” says Professor Yoshio Nishi, Director of the Stanford Nanofabrication Facility. “Nearly 150 individuals made use of our EVG tools over the last year. The EV Group tools have proven to be enormously robust and flexible which are essential in meeting the broad fabrication needs of our many researchers.”

“Particularly in research environments, the flexibility and easy-of use of the equipment are critical to the success of every project, besides proven performance”, says Erich Thallner, CEO and founder of EV Group. “At Stanford, this is achieved by a customized set-up for specific requirements to explore the field of nanoimprint lithography while offering the capability for top and bottom side lithography.”

Further systems from EV Group for cleaning, double-side alignment and wafer bonding have been previously installed at Stanford for advanced MEMS research including the EVG620 precision mask and bond aligner, the EVG501 wafer bonder and the EVG301 wafer cleaner.

About Stanford
The Stanford Nanofabrication Facility (SNF) at Stanford University provides micro- and nano- fabrication resources to researchers across all disciplines, from industry and government labs as well as academia. SNF is a founding member of the National Nanotechnology Infrastructure Network (the NNIN ) which is dedicated to promoting nanotechnology education and research.

Stanford Nanofabrication Facility
Stanford University
Room 143
Stanford, CA 94305-4070

Mary Tang
Tel.: +1 650 723-9980
[email protected]

About EV Group
Founded in 1980, EV Group is a global supplier of wafer bonders, aligners, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets. EV Group holds the dominant share of the market for wafer bonding equipment (especially SOI bonding) and is a leader in lithography for advanced packaging, MEMS and nanotechnology. The company’s unique Triple I approach (Invent – Innovate – Implement) is supported by a vertical infrastructure, allowing EV Group to respond quickly to new technology development, apply the technology to manufacturing challenges and expedite volume production. Headquartered in Sch


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