Purge gas purification used for 193nm steppers in Samsung Korea facility
BILLERICA, Mass., July 11 /PRNewswire-FirstCall/ — Mykrolis Corporation, a leading supplier of components and subsystems to the semiconductor industry, today announced that Samsung, a global leader in semiconductor, telecommunication, digital media and digital convergence technologies, is using Aeronex(R) Gas Purification systems. The systems have been installed in Samsung’s 300mm fab in Korea.
Aeronex Gas Purification Systems remove contaminants from purge gases that can affect light transmittance and damage optical components. These purge gases include nitrogen, oxygen, and clean dry air (CDA). The dual-bed, self- regenerating system design allows the purifier to always supply a continuous flow of ultra high purity gas that maximizes tool uptime for the customer’s process.
At Samsung, the Aeronex Gas Purification EGPS-8 systems provide purge gas purification for 193nm steppers, which are used in the manufacturing process of integrated circuits. As more 193nm steppers move into production at 300mm fabs worldwide, there will continue to be a growing demand for high quality gas purification systems that can provide ultra high purity gas at a lower cost of ownership.
“We are pleased that Samsung is using the Aeronex Gas Purification systems for their photolithography process. We will continue to work closely with Samsung to ensure we are providing leading edge technology that meets all of their demand-driven photolithography needs,” said Devon Kinkead, vice president of Gas Microcontamination at Mykrolis Corporation.
Many semiconductor fabs around the world including Samsung use the Aeronex Gas Purification systems and benefit from reduced cost of ownership, flexibility within their programming and the local support provided by Mykrolis’s team of experts in photolithography.
Mykrolis is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company’s products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Based in Billerica, Massachusetts, Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit http://www.mykrolis.com