SEMI West stresses emerging technologies

By Angela Godwin

July 11 marks the opening day of the 35th annual SEMICON West conference and exhibition focusing on the technology trends, market drivers, and challenges affecting the semiconductor industry. In addition to some 3,500 exhibits, this year’s event features several notable keynote speakers, including Dr. Robert R. Doering, co-chair of the International Roadmap Committee, which governs the International Technology Roadmap for Semiconductors (ITRS), and Sr. Fellow of silicon technology development at Texas Instruments.

The Emerging Technologies Hall, a new addition to the exhibition, will feature the latest innovations in nanotechnology, MEMS/Microsystems, Electronic Design Automation (EDA) and e-manufacturing. Ongoing, free presentations will take place here throughout the event.

Several courses will also be offered, including “Full Wafer Particle and Defect Detection, Review and Characterization,” which will provide a working knowledge of the techniques and methods for defect metrology and characterization in use in semiconductor processing and equipment industries.

Entegris will introduce two new products at SEMICON West 2005: the Spectra FOUP (left) and the NT IFC model 6510 flow controller (right).
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Many exhibitors will be unveiling their new products at the event this year. Entegris (Chaska, Minn.,, for example, will introduce two new products of particular interest to contamination-control professionals. First, the new, high-performance Spectra™ FOUP is fully compatible with all process tools and automation equipment to achieve the highest tool uptime available. It promises higher yields due to a proven design to protect wafers from particles, airborne molecular contamination, shock and vibration. The NT® IFC model 6510 flow controller is for point-of-use chemical blending and dispensing applications. It uses its reduced footprint to save space in liquid-handling systems and allows toolmakers to integrate more process functionality. It uses proven differential pressure flow measurement technology and advanced closed-loop process control. Visual indicators provide diagnostics for preventive maintenance, troubleshooting and alarm conditions, enabling users to maintain high uptime.

The Secure & Pure fluoropolymer-lined transport tanks from Edlon, Inc. are ideal for moving high-purity media from site to site.
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Edlon Inc. (Avondale, Pa., will exhibit the Secure & Pure™ family of ultrahigh-purity, fluoropolymer-lined Chemical Transport Tanks, ideally suited for moving high-purity media from site to site. Featuring state-of-the-art technology in fabrication technique, product performance, engineering design and innovation, these tanks utilize a fluoropolymer lining to eliminate metallic ion contamination, ensure product purity at the ppt level and accommodate highly concentrated acids.

SEMICON West will take place July 11-15, 2005, at the Moscone Center in San Francisco, Calif. For more information, visit III


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