Tegal receives expanded order

July 13, 2005 — Tegal Corp. (Nasdaq: TGAL), a designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, announced that a European integrated device manufacturer that had previously placed a multiple system order with Tegal has increased the order to include additional 6540 advanced etch systems.

The systems will be used in the production of high-K decoupling capacitors incorporated into cell phones and other wireless devices.

The company also said it had installed, upgraded and added a second process module to a 6500 advanced plasma etch system at the Instituto Trentino di Cultura (ITC) — Instituto per la Ricerca Scientifica e Tecnologica (IRST), an Italian R&D institute. The 6500 advanced etch system will be used for R&D and for the production of small lots of prototype MEMS devices.


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