July 22, 2005 – Ultratech Inc. has announced the appointment of Andrew Hawryluk, Ph.D., to the position of senior VP of engineering for lithography and laser processing. Hawryluk, 51, has over two decades of experience in the semiconductor industry, including high-level positions at Photon Dynamics and KLA-Tencor Corp.

In his new role, Hawryluk will lead all of the company’s engineering activities, reporting directly to Ultratech president and COO John Denzel.

Hawryluk’s most recent positions were VP of advanced technology, developing new technology and products, and VP of engineering, managing the worldwide engineering department, at Photon Dynamics.

Prior to that, he served as program manager and director of engineering at KLA-Tencor, where he managed the development of the company’s next-generation brightfield wafer-inspection tool.

Previously, Hawryluk held a succession of management positions at Nortel Networks and Lawrence Livermore National Laboratory. Additionally, he served as Ultratech’s director of engineering responsible for the 1X optical lens design and implementation, and was promoted to VP of engineering where he was involved in the research and development of the laser processing program.

Denzel noted, “We are extremely pleased to welcome Andy back to Ultratech. He brings to his new role a wealth of valuable industry experience and a deep knowledge of high-powered lasers, optics and photolithography systems.”

Hawryluk holds a bachelors, a masters and a PhD in electrical engineering and computer science from the Massachusetts Institute of Technology (MIT). He has been granted over 20 patents in the areas of semiconductor processing, optics and imaging, and particle beams and lasers.